The Series 6100 automatically performs zero, precision, span and multi-point calibrations using NO, NO2, SO2, CO, 03, hydrocarbons and other gases of interest. The 6100 meets all U.S. Environmental Protection Agency requirements. The Series 6100 consists of a single chassis supporting up to 3 thermal mass flow controllers, an ozone generation module, a mixing zone, a reaction chamber for gas phase titration, and control electronics. The Series 6100 ozone generator is factory calibrated using a NIST traceable ozone standard. This temperature controlled, ultra-violet (UV) based ozone generator includes a precision photo-optical feedback circuit to compensate for lamp aging effects.